Thermal sensing application of aluminum nitride thin film

Authors

Vernalyn Copa Materials Science and Engineering Program, University of the Philippines Diliman
Anthony Tuico Materials Science and Engineering Program, University of the Philippines Diliman
Erick John Carlo Solibet National Institute of Physics, University of the Philippines Diliman
Elmer Estacio National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Aluminum nitride (AlN) thin film is fabricated into a serpentine-structured thermal sensor. The fabricated sensor has a working area of 40mm x 40mm, with a thickness of 592 nm for the AlN sensing element. The sensing application of the device was tested in the range of 30°C to 100°C. The obtained proportionality constant, β, was found to have a 60/K deviation in the entire characterization range. The device was found to have better sensitivity, at -1.43%/K, in the lowest change in temperature measurement. β-equation was used as calibration equation in this study.

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Issue

2016: Proceedings of the 34th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2016-PB-07

Section

Poster Session PB

Published

2016-08-18

How to Cite

[1]

V Copa, A Tuico, EJC Solibet, E Estacio, A Salvador, and A Somintac, Thermal sensing application of aluminum nitride thin film, Proceedings of the Samahang Pisika ng Pilipinas 34, SPP-2016-PB-07 (2016). URL: https://proceedings.spp-online.org/article/view/SPP-2016-PB-07.