Piezoresistive performance of load sensor based on ZnO film deposited on metal substrate

Authors

Aldrin Bendal ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Laureen Ida Ballesteros ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Arven Cafe ⋅ PH National Institute of Physics, University of the Philippines Diliman
Yuta Louie Rola ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Joybelle Lopez ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Ron Avez ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We report on the piezoresistive performance of zinc oxide (ZnO) thin films for applications in devices such as load cell and strain sensors. ZnO thin films were deposited on stainless steel (ZnO/SS) and aluminum substrates (ZnO/Al) using spray pyrolysis. Raman spectroscopy confirmed the growth of ZnO with wurtzite structure on both metal substrates. Results from the reflectance spectroscopy show that ZnO film grown on aluminum sheet is smoother compared to the film grown on stainless steel. Using a center load cantilever setup, the room temperature piezoresistive response of ZnO/Al was observed to increase linearly from load masses 10g to 90g. On the otherhand, the ZnO/SS only exhibited the linear response at 100g to 300g.

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Issue

2017: Proceedings of the 35th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2017-PA-33

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2017-06-07

How to Cite

[1]

A Bendal, LI Ballesteros, A Cafe, YL Rola, J Lopez, R Avez, A Salvador, and A Somintac, Piezoresistive performance of load sensor based on ZnO film deposited on metal substrate, Proceedings of the Samahang Pisika ng Pilipinas 35, SPP-2017-PA-33 (2017). URL: https://proceedings.spp-online.org/article/view/263.