Study of morphological properties and elemental micro-composition of ZnO grown by femtosecond pulsed laser deposition

Authors

Joseph A. De Mesa ⋅ PH National Institute of Physics, University of the Philippines Diliman
Annaliza M. Amo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Luce Vida Sayson ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman
Wilson O. Garcia ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Growth of zinc oxide thins films on silicon (100) substrates were synthesized using femtosecond pulsed laser deposition (fs-PLD). The depositions were carried out at vacuum pressures 10^-2 and 10^-6 mbar with deposition time of 2, 3 and 4 hours. A mode-locked femtosecond laser operating at 790 nm with 100 fs pulse duration and 80MHz repetition rate was used as an excitation source. Scanning electron microscopy and energy dispersive X-ray spectroscopy were used to determine the surface morphology and elemental composition of the deposited materials, respectively. SEM micrographs reveal hexagonal-rod-like grains on the surface of the film and microcracks are observed which can be result of low deposition temperature. EDX spectroscopy shows zinc and oxygen as the elemental composition of deposited film with 72.6 and 27.24 atomic %. This work demonstrates a technique for deposition of ZnO on Si (100) substrate using low power fs-laser as an excitation source at low deposition temperature.

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Issue

2014: Proceedings of the 32nd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2014-PB-07

Section

Poster Session PB

Published

2014-10-17

How to Cite

[1]

JA De Mesa, AM Amo, LV Sayson, RV Sarmago, and WO Garcia, Study of morphological properties and elemental micro-composition of ZnO grown by femtosecond pulsed laser deposition, Proceedings of the Samahang Pisika ng Pilipinas 32, SPP2014-PB-07 (2014). URL: https://proceedings.spp-online.org/article/view/1879.