Flex sensing application of the piezoresistive property of AlN

Authors

Nestor D. Bareza ⋅ PH National Institute of Physics, University of the Philippines Diliman
Anthony R. Tuico ⋅ PH National Institute of Physics, University of the Philippines Diliman
Vernalyn C. Copa ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

This study develops a flex sensor based on Aluminum Nitride (AlN). The response was based on the piezoresistive property of the AlN. AlN thin film was fabricated into device and was assembled in a cantilever setup. In this setup, resistance was simulataneously measured while masses were successively added to deflect the cantilever. It was found that the tensile stress induced on the device increases the resistance value, which is consistent to the macroscopic gauge relationship of relative resistance and relative length. Similar trends of the response was also found at elevated temperature of the device.

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Issue

2014: Proceedings of the 32nd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2014-PA-15

Section

Poster Session PA

Published

2014-10-17

How to Cite

[1]

ND Bareza, AR Tuico, VC Copa, and AS Somintac, Flex sensing application of the piezoresistive property of AlN, Proceedings of the Samahang Pisika ng Pilipinas 32, SPP2014-PA-15 (2014). URL: https://proceedings.spp-online.org/article/view/1862.