Particle detection in a transport region of an ion implantation apparatus

Abstract

The performance of a detection system which visualizes particles of less than 200 μm diameter in an ion beam transport region has been investigated. The detection system consists of a laser, a mirror to guide the beam to traverse the ion beam, a lens to make a sheet-shaped laser beam, and a CCD camera to construct an image of scattered light from the particles. Carbon particles (<188 μm) loaded at the cathode of the ion source are accelerated with the ion beam by igniting a plasma, and the particle distribution in the beam has been successfully measured.