Plasma production by a high temperature carbon cathode for thin film formation

Abstract

High-Z impurity free plasmas were produced by high temperature carbon ribbons performing as the discharge cathodes capable of producing 20 mA discharge current in 0.6 Pa Ar environment. The distribution of plasma concentrated in the center of discharge chamber due to the influence of confinement magnetic field. In hot cathode sustained Ar plasma using carbon ribbons, carbon thin film was formed on glass substrates, and spectral analysis showed the emission of carbon atoms into the plasma. Langmuir probe measurement suggests the existence of negative ions in plasma, and the experimental system is modified to measure negative ion density by photo-detachment method.