Surface modification of (100) p-type silicon through Ar-O₂ and Ar-N₂ plasma treatment

Authors

Vincent Requero Mejarito ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Audric Zuriel Cruz Cruz ⋅ PH Department of Mining, Metallurgical and Materials Engineering, University of the Philippines Diliman
Magdaleno Vasquez ⋅ PH Department of Mining, Metallurgical and Materials Engineering, University of the Philippines Diliman
Arnel A Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Silicon wafers were surface modified by the treatment of argon-oxygen (Ar-O₂) and argon-nitrogen (Ar-N₂) RF-frequency plasma, and characterized their changes in surface property using contact angle measurement and Fourier transform infrared spectroscopy (FTIR). The treatment of silicon wafers by Ar-O₂ and Ar-N₂ resulted in increased hydrophilicity for both treatment regimes. Silicon treated Ar-N₂ plasma sample has the greater surface free energy compared to Silicon treated Ar-O₂ plasma and the untreated sample. Subsequent Fourier-transform infrared spectroscopy results confirmed the presence of characteristic Si-O and Si-N bonds; however, due to the adsorbence of water, many of these peaks were not readily apparent. Surface morphological studies may be performed in order to view further effects of the plasma treatment.

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Issue

2017: Proceedings of the 35th Samahang Pisika ng Pilipinas Physics Conference

Opportunities and challenges in physics collaboration and research
7-10 June 2017, Cebu City

Mabuhay! This is our first issue published using PKP's Online Journal Systems (OJS). Full online access to PDF articles is provided to registered Paperview users.

Article ID

SPP-2017-PA-05

Section

Poster Session A (Materials Science, Instrumentation, and Photonics)

Published

2017-06-07

How to Cite

[1]

VR Mejarito, AZC Cruz, M Vasquez, and AA Salvador, Surface modification of (100) p-type silicon through Ar-O2 and Ar-N2 plasma treatment, Proceedings of the Samahang Pisika ng Pilipinas 35, SPP-2017-PA-05 (2017). URL: https://proceedings.spp-online.org/article/view/148.