Optical emission spectroscopy of CH₄:H₂ plasma via DC hollow-cathode discharge facility

Authors

Aiko Love del Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman
Catherine Joy Dela Cruz ⋅ PH National Institute of Physics, University of the Philippines Diliman
Carmencita Lumban ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Optical emission spectra (OES) of DC hollow cathode plasma produced using methane and hydrogen feed gases were investigated to find the optimum parameters needed for DLC deposition. The effect of different filling pressures, applied voltages, and methane-hydrogen gas ratio were analyzed. OES peaks revealed the presence of Hydrogen Balmer Lines (H_α, H_β, and H_γ), H₂, C₂ Swan band system and CH species for all CH₄/H₂ gas ratios. Results showed the intensity of emission lines increases with filling pressure and applied voltage, and difference in the methane-hydrogen gas ratio affects the presence of CH radicals in the OES of the plasma. Suggested parameters to consider for DLC synthesis were 35 sccm total gas flow and at least 1000 V applied voltage.

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Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-PB-28

Section

Poster Session PB

Published

2015-06-03

How to Cite

[1]

AL del Rosario, CJ Dela Cruz, C Lumban, and HJ Ramos, Optical emission spectroscopy of CH4:H2 plasma via DC hollow-cathode discharge facility, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-PB-28 (2015). URL: https://proceedings.spp-online.org/article/view/1234.