Development of aluminum nitride as temperature sensor for clinical applications
Abstract
The sensing capability of aluminum nitride (AlN) was investigated in the human body temperature range. To calibrate the temperature sensor, the Seebeck coefficient (S) was determined at selected TH from 30°C to 60°C for two trials. The consistency of S was verified at an average value of 859 µV/K. The voltage response of the temperature sensor was determined at selected TH from 35°C to 42°C. The measured time constants varied from 0.3-0.47 seconds. AlN was successfully demonstrated as functional low-range temperature sensor applicable in the human temperature range.