Resistance response of a nanoporous silicon gas sensor in the presence of alcohol vapour

Authors

Michaelrey A. Cainglet ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando S. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Alcohol vapour based on nanoporous silicon was fabricated from 1.00 cm 1.75 cm p+ type silicon (100) in HF ethanoic solution via electrochemical etching. The surface morphology of the fabricated nanoporous silicon was characterized using Field Emission Scanning Electron Microscopy (FE-SEM). The structure of this sensor consists of porous silicon layer and silver electrode which is deposited on the surface of sensor. The sensing ability of porous silicon towards organic vapour was studied. The sensitivity of the sensor was determined as the ratio of the resistivity of structures in the presence of investigated gas to that in air. The resistance of porous silicon increased in the presence of alcohol vapour. It is found that the fabricated sensor can detect different concentration of alcohol vapour from 250 ppm to 1000 ppm.

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Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-PB-14

Section

Poster Session PB

Published

2015-06-03

How to Cite

[1]

MA Cainglet, AA Salvador, and AS Somintac, Resistance response of a nanoporous silicon gas sensor in the presence of alcohol vapour, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-PB-14 (2015). URL: https://proceedings.spp-online.org/article/view/1220.