Effect of hollow cathode inner diameter on the I-V characteristic and carbon nitride concentration in CH₄-N₂ mixture plasma

Authors

Ralph Aaron S. Aguinaldo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Catherine Joy M. Dela Cruz ⋅ PH National Institute of Physics, University of the Philippines Diliman
Aiko Love B. del Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The optimal parameters for a-CN_x deposition using CH₄-N₂ plasma in a DC-hollow cathode discharge facility were investigated. Three graphite hollow cathodes of varied inner diameters were tested for the I-V characteristic over CH₄ concentrations of 5-15% at 20 sccm total flow rate. OES was used to quantify the relative amount of CN in the plasma. The 9 mm cathode produced the highest CN percentage, however, the 2 mm and 5 mm cathodes prove to be more power efficient. The highest CN percentage for the 2mm and 5mm cathodes were achieved at 10% CH₄ at 1500 kV.

Downloads

Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-PA-29

Section

Poster Session PA

Published

2015-06-03

How to Cite

[1]

RAS Aguinaldo, CJM Dela Cruz, ALB del Rosario, and HJ Ramos, Effect of hollow cathode inner diameter on the I-V characteristic and carbon nitride concentration in CH4-N2 mixture plasma, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-PA-29 (2015). URL: https://proceedings.spp-online.org/article/view/1185.