Simultaneous acquisition of confocal reflectance image and optical beam-induced current map of an EPROM 2764 operating in read mode

Abstract

The objective of the experiment is to simultaneously acquire both the optical beam-induced current and confocal reflectance images of an EPROM 2764 operating in read mode which allows a better analysis of the semiconductor sample as the specific region of excitation can be identified. A Helium-Neon-based confocal reflectance microscope has been developed which has been applied to the EPROM. It was able to construct a three-dimensional surface representation of a portion of the EPROM but its OBIC map was inconclusive since the underlying internal architecture of the EPROM is unknown to the experimenter. However, the OBIC map can still be associated to the locations of the p-n junctions of the sample.