Simultaneous acquisition of confocal reflectance image and optical beam-induced current map of an EPROM 2764 operating in read mode

Authors

  • Betz Sacyap Hayag ⋅ PH Department of Physics, University of San Carlos
  • Elijah Marie Quinicot ⋅ PH Department of Physics, University of San Carlos
  • Dexter Manalili ⋅ PH Department of Physics, University of San Carlos
  • Raymund Sarmiento ⋅ PH Department of Physics, University of San Carlos

Abstract

The objective of the experiment is to simultaneously acquire both the optical beam-induced current and confocal reflectance images of an EPROM 2764 operating in read mode which allows a better analysis of the semiconductor sample as the specific region of excitation can be identified. A Helium-Neon-based confocal reflectance microscope has been developed which has been applied to the EPROM. It was able to construct a three-dimensional surface representation of a portion of the EPROM but its OBIC map was inconclusive since the underlying internal architecture of the EPROM is unknown to the experimenter. However, the OBIC map can still be associated to the locations of the p-n junctions of the sample.

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Article ID

SPP-2015-5A-07

Section

Photonics and Terahertz, Optics and Signal Processing

Published

2015-06-03

How to Cite

[1]
BS Hayag, EM Quinicot, D Manalili, and R Sarmiento, Simultaneous acquisition of confocal reflectance image and optical beam-induced current map of an EPROM 2764 operating in read mode, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-5A-07 (2015). URL: https://proceedings.spp-online.org/article/view/1139.