Optical characterization of tin oxide-coated porous silicon
Abstract
Fabrication and characterization of tin oxide-coated porous silicon are presented. The effects of varying the current density and thickness during the electrochemical etching of the samples were investigated. Also, tin oxide was successfully deposited on porous silicon through nebulized spray pyrolysis. Initially, the refractive indices of pSi samples varied at various thicknesses of 500 nm, 800 nm and 1500 nm were 1.76, 1.51 and 1.37, respectively. However, for samples coated with tin oxide, refractive indices obtained from reflectance spectra were 2.08, 1.62 and 1.31, respectively. Porosity in porous silicon is greater than that of porous silicon-oxide.
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